Process Monitor

Novx Series 7000 Process Monitor
Constant Dedicated Process Monitoring

The Novx Series 7000 is a microprocessor-based instrument with ESD/EMI constant dedicated monitoring, alert notifications, increased data processing and reporting capacity. The monitor will communicate with most any commercially available particle counters/detectors in addition to its own ESC/ESD-related monitoring features. Optional monitoring features include detection of field charge (ionization balance monitoring) with automatic or manual decay testing, EMI magnitude and pulse counting, ESD event detection, dual-channel ground monitoring and body voltage/current detection. All alarm thresholds, SPC parameters and tool shut-down warning and alarm levels are customer programmable.

Features & Benefits:
• Smart signal processing
• EM noise levels tracking
• Dynamic threshold analysis
• Independent EMI and ESD event detection
• Increased data processing
• SPC direct tool interface/control
• Particle counter interface
• Field sensing with decay testing
• Ionizer closed-loop control/status
• Body voltage or current detection
• Ground monitoring
• Process environment monitoring
• User-programmable alarm set points
• RS-485, Modbus, Ethernet, wireless Ethernet (802.11a/b/g)
• Critical alert notifications
• Modular construction

All process features are plug-in modules (daughter boards) that can be added at any time including:
• NanoPulse detection.
• Field sensing with decay testing.
• EMI/ESD detection
• Particle counter/detector communication.
• Body voltage or current detection and ground monitoring with a single- or dual-wire wrist-strap.
• Communication for interface to the Novx PEMS Software.