Modulated Pulse Ultra-Clean AeroBar

5635 Extended ISO Class 1 Ultra-clean Modulated Pulse AeroBar 

Modulated Pulse Technology with Wide Adjustability & ISO 14644-12 Ionization

Simco-Ion's AeroBar 5635 Modulated Pulse ionizing bar is specifically designed to eliminates static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery.

This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness, critical for smaller technology nodes.

• ISO 14644-12 (0.01 µm particles) ionization
• ISO 14644 Class 1 (0.1 µm particles) cleanliness
• Modulated pulse technology
• Excellent lateral uniformity
• Low field voltages
• Air-assist capability
• Optional software with easy-to-use interface with wide adjustability
• Alarm output signal

78mm high x 34mm wide and available in the following lengths:

450, 600, 850, 1000, 1150, 1300, 1450, 1600, 1750, 1900, 2050, 2200, 2350mm