Digital AeroBar
Description
Software Controlled Ultra-clean Digital Ionizing Digital AeroBar® Model 5225
Simco-Ion’s Digital AeroBar® with Software Control Model 5225 is designed to handle the demanding requirements of in-tool ionization. With high ion output providing fast neutralization of electric charge on wafers, compliance is achieved of the E-78 recommended electrostatic levels for technology nodes down to 25 nm, the most stringent requirement of semiconductor manufacturers.